Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy

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Authors: Neuenschwander, Matthias ; Andany, Santiago H. ; Kanguel, Mustafa ; Hosseini, Nahid ; Fantner, Georg E.

Journal title: IEEE Xplore

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/transducers50396.2021.9495715

ISBN: 978-1-6654-4845-1