Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

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Authors: Berke Erbas,Ana Conde-Rubio ,Xia Liu ,Joffrey Pernollet ,Zenyu Wang ,Arnaud Bertsch ,Marcos Penedo ,Georg Fantner ,Mitali Banerjee ,Andras Kis ,Giovanni Boero ,Juergen Brugger

Journal title: 12 July 2023, Version 1

Journal publisher: ChemRxiv

Published year: 2023

DOI identifier: 10.26434/chemrxiv-2023-x0r76

ISSN: 2573-2293