Microstructure and residual stress evolution in nanocrystalline Cu-Zr thin films

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Authors: J. Chakraborty, T. Oellers, R. Raghavan, A. Ludwig, G. Dehm

Journal title: Journal of Alloys and Compounds

Journal number: 896

Journal publisher: Elsevier BV

Published year: 2022

Published pages: 162799

DOI identifier: 10.1016/j.jallcom.2021.162799

ISSN: 0925-8388