Thin-Film Microtensile-Test Structures for High-Throughput Characterization of Mechanical Properties

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Authors: T. Oellers, V. G. Arigela, C. Kirchlechner, G. Dehm, A. Ludwig

Journal title: ACS Combinatorial Science

Journal publisher: American Chemical Society

Published year: 2020

DOI identifier: 10.1021/acscombsci.9b00182

ISSN: 2156-8952