Low‐Temperature Sputtered Ultralow‐Loss Silicon Nitride for Hybrid Photonic Integration

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Authors: Shuangyou Zhang; Toby Bi; Irina Harder; Olga Ohletz; Florentina Gannott; Alexander Gumann; Eduard Butzen; Yaojing Zhang; Pascal Del'Haye

Journal title: Laser and Photonics Reviews

Journal number: 8

Journal publisher: Wiley

Published year: 2023

DOI identifier: 10.1002/lpor.202300642

ISSN: 1863-8899