Learning-based Defect Recognition for Quasi-Periodic Microscope Images

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Authors: Dennler, Nik; Foncubierta-Rodriguez, Antonio; Neupert, Titus; Sousa, Marilyne

Journal title: Micron

Journal publisher: Pergamon Press Ltd.

Published year: 2021

DOI identifier: 10.1016/j.micron.2021.103069

ISSN: 0968-4328