Fabrication of spectrally sharp Si-based dielectric resonators: combining etaloning with Mie resonances.

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Authors: D. Toliopoulos; 1; 2 M. Khoury; 1 M. Bouabdellaoui; 1 N. Granchi; 3 J.-B. Claude; 1; 4 A. Benali; 1 I. Berbezier; 1 D. Hannani; 1 A. Ronda; 1 J. Wenger; 4 M. Bollani; 5 M. Gurioli; 1 S. Sanguinetti; 2; 5 F. Intonti; 3; M. Abbarchi1

Journal title: Optics Express

Journal number: 28

Journal publisher: Optical Society of America

Published year: 2020

Published pages: 37734-37742

DOI identifier: 10.1364/oe.409001

ISSN: 1094-4087