CMOS-compatible all-dielectric metalens for improving pixel photodetector arrays

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Authors: E. Mikheeva, Jean-Benoit Claude, M. Salomoni, J. Wenger, J. Lumeau, R. Abdeddaim, A. Ficorella, A. Gola, G. Paternoster, M. Paganoni, E. Auffray, P. Lecoq, and S. Enoch

Journal title: APL Photonics

Journal publisher: American Institute of Physics

Published year: 2020

DOI identifier: 10.1063/5.0022162

ISSN: 2378-0967