Burg algorithm for enhancing measurement performance in wavelength scanning interferometry

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Authors: Rebecca Woodcock, Hussam Muhamedsalih, Haydn Martin, Xiangqian Jiang

Journal title: Surface Topography: Metrology and Properties

Journal number: 4/2

Journal publisher: IOP Publishing Ltd

Published year: 2016

Published pages: 024003

DOI identifier: 10.1088/2051-672X/4/2/024003

ISSN: 2051-672X