An integrated opto-mechanical measurement system for in-process defect measurement on a roll-to-roll process

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Authors: Muhamedsalih, H., Blunt, L., Martin, H., Hamersma, I., Elrawemi, M. and Feng, G.

Journal title: Laser Metrology and Machine Performance XI, LAMDAMAP

Journal publisher: EUSPEN

Published year: 2015

Published pages: 50-55

ISBN: 978-0-9566790-5-5