Vertical axis non-linearities in wavelength scanning interferometry

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Authors: Moschetti, G., Muhamedsalih, H., Connor, D., Jiang, X. and Leach, R.

Journal title: Laser Metrology and Machine Performance XI, LAMDAMAP 2015

Journal publisher: EUSPEN

Published year: 2015

Published pages: 31-39

ISBN: 978-0-9566790-5-5