N 2 –H 2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H 2 amount on electrons, positive ions and ammonia formation

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Authors: Audrey Chatain, Miguel Jiménez-Redondo, Ludovic Vettier, Olivier Guaitella, Nathalie Carrasco, Luis Lemos Alves, Luis Marques, Guy Cernogora

Journal title: Plasma Sources Science and Technology

Journal number: 29/8

Journal publisher: IOP

Published year: 2020

Published pages: 085019

DOI identifier: 10.1088/1361-6595/ab9b1a

ISSN: 1361-6595