Redeposition-Free Deep Etching in Small KY(WO4)2 Samples

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Authors: Simen Mikalsen Martinussen, Raimond N. Frentrop, Meindert Dijkstra, Sonia Maria Garcia-Blanco

Journal title: Micromachines

Journal number: 11/12

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 1033

DOI identifier: 10.3390/mi11121033

ISSN: 2072-666X