Single-layer active-passive Al2O3 at the wafer level: optimization study

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Authors: C.I. van Emmerik, M. Dijkstra, L. Chang, M. de Goede, J. Mu and Sonia M. Garcia-Blanco

Journal title: 22nd IEEE Photonics Society Benelux Annual Symposium

Journal number: Yearly

Journal publisher: IEEE

Published year: 2018