Force characterization and analysis of thin film actuators for untethered microdevices

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Authors: Federico Ongaro, Qianru Jin, Ugo Siciliani de Cumis, Arijit Ghosh, Alper Denasi, David H. Gracias, Sarthak Misra

Journal title: AIP Advances

Journal number: 9/5

Journal publisher: American Institute of Physics Inc.

Published year: 2019

Published pages: 055011

DOI identifier: 10.1063/1.5088779

ISSN: 2158-3226