Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

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Authors: O.O. Versolato, J. Sheil, S. Witte, W.M.G. Ubachs and R. Hoekstra

Journal title: J. Opt.

Journal publisher: Institute of Physics Publishing

Published year: 2022

DOI identifier: 10.1088/2040-8986/ac5a7e

ISSN: 2040-8978