Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source

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Authors: S. Rai, K. Bijlsma, L. Poirier, E. de Wit, L. Assink, A. Lassise, I. Rabadán, L. Méndez, J. Sheil, O.O. Versolato and R. Hoekstra

Journal title: Plasma Sources Science and Technology

Journal publisher: Institute of Physics Publishing

Published year: 2023

DOI identifier: 10.1088/1361-6595/acc274

ISSN: 0963-0252