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Authors: D.J. Hemminga, L. Poirier, M.M. Basko, R. Hoekstra, W.M.G. Ubachs, O.O. Versolato and J. Sheil
Journal title: Plasma Sources Science and Technology
Journal publisher: Institute of Physics Publishing
Published year: 2021
DOI identifier: 10.1088/1361-6595/ac2224
ISSN: 0963-0252