Integration of Ferroelectric HfxZr1-xO2 on Vertical III-V Nanowire Gate-All-Around FETs on Silicon

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Authors: Anton E. O. Persson; Zhongyunshen Zhu; Robin Athle; Lars-Erik Wernersson

Journal title: ISSN: 0741-3106

Journal number: 1

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2022

DOI identifier: 10.1109/led.2022.3171597

ISSN: 0741-3106