Spacer-Defined Intrinsic Multiple Patterning

Summary

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Sophia Katharine Laney, Tao Li, Martyna Michalska, Francisco Ramirez, Mark Portnoi, Junho Oh, Manish K. Tiwari, Iain G. Thayne, Ivan P. Parkin, Ioannis Papakonstantinou

Journal title: ACS Nano

Journal number: 14/9

Journal publisher: American Chemical Society

Published year: 2020

Published pages: 12091-12100

DOI identifier: 10.1021/acsnano.0c05497

ISSN: 1936-0851