Summary
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Authors: Sara Ghomi, Pinaka Pani Tummala, Raimondo Cecchini, Carlo S. Casari, Alessio Lamperti, Carlo Grazianetti, Christian Martella, Alessandro Molle
Journal title: Materials Science and Semiconductor Processing
Journal number: 68
Journal publisher: Pergamon Press
Published year: 2023
Published pages: 107838
DOI identifier: 10.1016/j.mssp.2023.107838
ISSN: 1369-8001