Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

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Authors: Simon Pinzek; Thomas Beckenbach; Manuel Viermetz; Pascal Meyer; Alex Gustschin; Jana Andrejewski; Nikolai Gustschin; Julia Herzen; Joachim Schulz; Franz Pfeiffer

Journal title: Scientific Reports

Journal number: 3

Journal publisher: Nature Publishing Group

Published year: 2022

DOI identifier: 10.1117/1.jmm.20.4.043801

ISSN: 2045-2322