Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: Valentina Wieser, Pierluigi Bilotto, Ulrich Ramach, Hui Yuan, Kai Schwenzfeier, Hsiu-Wei Cheng, Markus Valtiner
Journal title: Journal of Vacuum Science & Technology A
Journal number: 39/2
Journal publisher: American Institute of Physics
Published year: 2021
Published pages: 023201
DOI identifier: 10.1116/6.0000611
ISSN: 0734-2101