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Authors: Elizaveta Vereshchagina, Pierre Carmona, Erik Andreassen, Jorn Batalden, Martin Plassen, Michal M. Mielnik
Journal title: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
Journal number: Yearly
Journal publisher: IEEE
Published year: 2018
Published pages: 1257-1260
DOI identifier: 10.1109/memsys.2018.8346792
ISBN: 978-1-5386-4782-0