Smooth Sidewalls on Crystalline Gold through Facet-Selective Anisotropic Reactive Ion Etching: Toward Low-Loss Plasmonic Devices

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Authors: Alexander B. Greenwood; Krishna C. Balram; Henkjan Gersen

Journal title: Nano Letters

Journal number: 22

Journal publisher: American Chemical Society

Published year: 2022

Published pages: 4617-4621

DOI identifier: 10.1021/acs.nanolett.1c04405

ISSN: 1530-6992