Rapid Prototyping of Inertial MEMS Devices through Structural Optimization

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Authors: Daniele Giannini; Giacomo Bonaccorsi; Francesco Braghin

Journal title: Sensors (Basel, Switzerland)

Journal number: 21(15)-5064

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2021

Published pages: 1-19

DOI identifier: 10.3390/s21155064

ISSN: 1424-8220