Influence of Post-UV/Ozone Treatment of Ultrasonic-Sprayed Zirconium Oxide Dielectric Films for a Low-Temperature Oxide Thin Film Transistor

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Authors: Abayomi Titilope Oluwabi, Diana Gaspar, Atanas Katerski, Arvo Mere, Malle Krunks, Luis Pereira, Ilona Oja Acik

Journal title: Materials

Journal number: 13/1

Journal publisher: MDPI Open Access Publishing

Published year: 2020

Published pages: 6

DOI identifier: 10.3390/ma13010006

ISSN: 1996-1944