Strain in heterogeneous quantum devices with atomic layer deposition

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Authors: Oscar W Kennedy, James O'Sullivan, Christoph W Zollitsch, Christopher N Thomas, Stafford Withington and John J L Morton

Journal title: Materials for Quantum Technology

Journal number: 26334356

Journal publisher: Institute of Physics

Published year: 2021

Published pages: 045002

DOI identifier: 10.1088/2633-4356/ac2ef7

ISSN: 2633-4356