A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

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Authors: Jianxun Hong, Andrew M. Spring, Feng Qiu, Shiyoshi Yokoyama

Journal title: Scientific Reports

Journal number: 9/1

Journal publisher: Nature Publishing Group

Published year: 2019

DOI identifier: 10.1038/s41598-019-49324-5

ISSN: 2045-2322