Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Erwin Berenschot; Roald M. Tiggelaar; Bjorn Borgelink; Chris van Kampen; Cristian S. Deenen; Yasser Pordeli; Haye Witteveen; Han J. G. E. Gardeniers; Niels R. Tas

Journal title: ACS Applied Nano Materials

Journal number: 1

Journal publisher: ACS

Published year: 2022

Published pages: 15847-15854

DOI identifier: 10.1021/acsanm.2c04079

ISSN: 2574-0970