A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

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Authors: D. Jonker, Z. Jafari, J. P. Winczewski, C. Eyovge, J. W. Berenschot, N. R. Tas, J. G. E. Gardeniers, I. De Leon, A. Susarrey-Arce

Journal title: Nanoscale Advances

Journal number: 3/17

Journal publisher: Royal Society of Chemistry

Published year: 2021

Published pages: 4926-4939

DOI identifier: 10.1039/d1na00316j

ISSN: 2516-0230