Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles

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Authors: Bjorn T.H. Borgelink; Erwin J. W. Berenschot; Remco G.P. Sanders; Stefan Schlautmann; Han Gardeniers; Niels R. Tas

Journal title: 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, 259 - 262

Journal number: 1

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/mems51670.2022.9699536