Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton

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Authors: A. C. Marques, J. Faria, P. Perdigão, B. M. M. Faustino, Riina Ritasalo, Katiuscia Costabello, R. C. da Silva, I. Ferreira

Journal title: Scientific Reports

Journal number: 9/1

Journal publisher: Nature Publishing Group

Published year: 2019

DOI identifier: 10.1038/s41598-019-54451-0

ISSN: 2045-2322