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Authors: Mayandi, Jeyanthinath Schrade, Matthias Vajeeston, Ponniah Stange, Marit Lind, Anna M Sunding, Martin F Deuermeier, Jonas Fortunato, Elvira Løvvik, Ole M Ulyashin, Alexander G Diplas, Spyros Carvalho, Patricia A Finstad, Terje G
Journal title: Journal of Vacuum Science & Technology A
Journal publisher: American Institute of Physics
Published year: 2022
DOI identifier: 10.1116/6.0001394
ISSN: 0734-2101
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