Summary
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Authors: A. R. Vollertsen, D. de Boer, S. Dekker, B. A. M. Wesselink, R. Haverkate, H. S. Rho, R. J. Boom, M. Skolimowski, M. Blom, R. Passier, A. van den Berg, A. D. van der Meer, M. Odijk
Journal title: Microsystems & Nanoengineering
Journal number: 6/1
Journal publisher: Springer Nature
Published year: 2020
DOI identifier: 10.1038/s41378-020-00216-z
ISSN: 2055-7434