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Authors: Michael Gomez, Dominic Vella, Derek E Moulton
Journal title: Journal of Micromechanics and Microengineering
Journal number: 28/11
Journal publisher: Institute of Physics Publishing
Published year: 2018
Published pages: 115002
DOI identifier: 10.1088/1361-6439/aad72f
ISSN: 0960-1317