Pull-in dynamics of overdamped microbeams

Summary

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Authors: Michael Gomez, Dominic Vella, Derek E Moulton

Journal title: Journal of Micromechanics and Microengineering

Journal number: 28/11

Journal publisher: Institute of Physics Publishing

Published year: 2018

Published pages: 115002

DOI identifier: 10.1088/1361-6439/aad72f

ISSN: 0960-1317