Polarimetric analysis of stress anisotropy in nanomechanical silicon nitride resonators

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Authors: T. Capelle, Y. Tsaturyan, A. Barg, A. Schliesser

Journal title: Applied Physics Letters

Journal number: 110/18

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 181106

DOI identifier: 10.1063/1.4982876

ISSN: 0003-6951