Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8.

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Authors: Emil Ludvigsen; Nina Ritter Pedersen; Xiaolong Zhu; Rodolphe Marie; David M. A. Mackenzie; Jenny Emnéus; Dirch Hjorth Petersen; Anders Kristensen; Stephan Sylvest Keller

Journal title: Micromachines

Journal number: 12

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2021

Published pages: 564

DOI identifier: 10.3390/mi12050564

ISSN: 2072-666X