Smooth GaN membranes by polarization-assisted electrochemical etching

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Authors: Joachim Ciers; Michael Alexander Bergmann; Filip Hjort; J.-F. Carlin; Nicolas Grandjean; Åsa Haglund

Journal title: Applied Physics Letters

Journal number: 1

Journal publisher: American Institute of Physics

Published year: 2021

DOI identifier: 10.1063/5.0034898

ISSN: 0003-6951