Fabrication and replication of re-entrant structures by nanoimprint lithography methods

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Authors: Nikolaos Kehagias, Achille Francone, Markus Guttmann, Frank Winkler, Ariadna Fernández, Clivia M. Sotomayor Torres

Journal title: Journal of Vacuum Science & Technology B

Journal number: 36/6

Journal publisher: AVS Science and Technology Society

Published year: 2018

Published pages: 06JF01

DOI identifier: 10.1116/1.5048241

ISSN: 2166-2754