Thermal roll to roll nanoimprint lithography for micropillars fabrication on thermoplastics

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Authors: Aritz Retolaza, Aritz Juarros, Jorge Ramiro, Santos Merino

Journal title: Microelectronic Engineering

Journal number: 193

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 54-61

DOI identifier: 10.1016/j.mee.2018.02.026

ISSN: 0167-9317