Miniature Robust High-Bandwidth Force Sensor with Mechanically Amplified Piezoresistive Readout

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Authors: Dennis Alveringh, Diana L. van der Ven, Henk-Willem Veltkamp, Kevin M. Batenburg, Remco G. P. Sanders, David Fernandez Rivas, and Remco J. Wiegerink

Journal title: IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/mems51670.2022.9699639