Correlation of Structural Modifications by Multiscale Phase Mapping in Filamentary Type HfO 2 -based RRAM: Towards a Component Specific in situ TEM Investigation

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Authors: Alexander Zintler, Robert Eilhardt, Stefan Petzold, Nico Kaiser, Sharath Ulhas, Lambert Alff, Leopoldo Molina-Luna

Journal title: Microscopy and Microanalysis

Journal number: 25/S2

Journal publisher: Cambridge University Press

Published year: 2019

Published pages: 1842-1843

DOI identifier: 10.1017/s1431927619009942

ISSN: 1431-9276