Ultrashort pulsed laser micromachining of glass using an interlaced laser beam scanning method

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Authors: K.L. Wlodarczyk, J. Schille, L. Naumann, A.A. Lopes, I. Bitharas, P. Bidare, S.D. Dondieu, P. Blair, U. Loeschner, A.J. Moore, M.M. Maroto-Valer, D.P. Hand

Journal publisher: 21st International Symposium on Laser Precision Microfabrication (LPM 2020)

Published year: 2020