Atomic Layer Deposition of MoSe2 Using New Selenium Precursors

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Authors: Raul Zazpe, Jaroslav Charvot, Richard Krumpolec, Luděk Hromádko, David Pavliňák, Filip Dvorak, Petr Knotek, Jan Michalicka, Jan Přikryl, Siowwoon Ng, Veronika Jelínková, Filip Bureš, Jan M. Macak

Journal title: FlatChem

Journal number: 21

Journal publisher: Elsesvier

Published year: 2020

Published pages: 100166

DOI identifier: 10.1016/j.flatc.2020.100166

ISSN: 2452-2627