Thermal Transport and Frequency Response of Localized Modes on Low-Stress Nanomechanical Silicon Nitride Drums Featuring a Phononic-Band-Gap Structure

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Authors: Pedram Sadeghi, Manuel Tanzer, Niklas Luhmann, Markus Piller, Miao-Hsuan Chien, Silvan Schmid

Journal title: Physical Review Applied

Journal number: 14/2

Journal publisher: American Physical Society

Published year: 2020

DOI identifier: 10.1103/physrevapplied.14.024068

ISSN: 2331-7019