Modelling the Electrostatic Actuation of Nanomechanical Pillar Dimers

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Authors: Andreas Kainz, Roman Beigelbeck, and Silvan Schmid

Journal title: Frontiers in Mechanical Engineering

Journal number: 6:611590

Journal publisher: Frontiers Media SA

Published year: 2020

DOI identifier: 10.3389/fmech.2020.611590

ISSN: 2297-3079