Effect of oxygen plasma on nanomechanical silicon nitride resonators

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Authors: Niklas Luhmann, Artur Jachimowicz, Johannes Schalko, Pedram Sadeghi, Markus Sauer, Annette Foelske-Schmitz, Silvan Schmid

Journal title: Applied Physics Letters

Journal number: 111/6

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 063103

DOI identifier: 10.1063/1.4989775

ISSN: 0003-6951