Nanoelectromechanical infrared detector

Summary

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Authors: Markus Piller, Niklas Luhmann, Miao-Hsuan Chien, Silvan Schmid

Journal title: Optical Sensing, Imaging, and Photon Counting: From X-Rays to THz 2019

Journal publisher: SPIE

Published year: 2019

Published pages: 1

DOI identifier: 10.1117/12.2528416

ISBN: 9781-510628700