Electrical Insulation of CMUT Elements Using DREM and Lapping

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Authors: Stine Lovholt Grue, Mathias Engholm, Erik Vilain Thomsen

Journal title: 2020 IEEE International Ultrasonics Symposium

Journal publisher: IEEE

Published year: 2020

DOI identifier: 10.1109/ius46767.2020.9251676

ISBN: 978-1-7281-5448-0